IEC 62047-34:2019 ED1


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IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

Products specifications

  • Standard from IEC
  • Published:
  • Edition: 1
  • Document type: IS
  • Pages
  • ISBN: 9782832267196
  • Publisher: IEC
  • Distributor: IEC
  • ICS: 31.080.99
  • ICS: 31.140
  • International TC: TC 47/SC 47F