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ISO/TR 19319:2013

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Abstract

ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

Products specifications

  • Standard from ISO
  • Published:
  • Edition: 2
  • Document type: TR
  • Pages
  • Publisher: ISO
  • Distributor: ISO
  • ICS: 71.040.40
  • International TC: ISO/TC 201/SC 2

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