Standard

ISO 21360-6:2023

Current

Existing or new amendments and versions must be purchased separately.

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Abstract

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Products specifications

  • Standard from ISO
  • Published:
  • Edition: 1
  • Document type: IS
  • Pages
  • Publisher: ISO
  • Distributor: ISO
  • ICS: 23.160
  • International TC: ISO/TC 112