Standard

ISO 18114:2003

Withdrawn

Note: Latest version: ISO 18114:2021

Existing or new amendments and versions must be purchased separately.

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Abstract

ISO 18114:2003 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

Products specifications

  • Standard from ISO
  • Published:
  • Withdrawn:
  • Period for objection until:
  • Edition: 1
  • Document type: IS
  • Pages
  • Publisher: ISO
  • Distributor: ISO
  • ICS: 71.040.40
  • International TC: ISO/TC 201/SC 6

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