Standard

ISO 14644-2:2015

Dec 2015 Current

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Abstract

ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration. ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

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Standard from ISO
Published: December 9 2015
Edition: 2
Document type: IS
Pages
ISBN:

Publisher: ISO
Distributor: ISO
ICS: 13.040.35
International TC: ISO/TC 209

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Adopted by: SN EN ISO 14644-2:2016
Adopted by: NF EN ISO 14644-2:2016
Revises: ISO 14644-2:2000

ISO 14644-2:2015

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ISO 14644-2:2015

ISO 14644-2:2000

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ISO 14644-2:2015

ISO 14644-2:2000

Abstract

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