Standard

IEC TR 63258:2021 ED1

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Abstract

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

Products specifications

  • Standard from IEC
  • Published:
  • Edition: 1
  • Document type: TR
  • Pages
  • Publisher: IEC
  • Distributor: IEC
  • ICS: 07.120
  • International TC: TC 113