Standard

IEC/IEEE 62659:2015 ED1

Sep 2015 Current

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Language English

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Abstract

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

Products specifications

Standard from IEC
Published: September 30 2015
Edition: 1
Document type: IS
Pages
ISBN: 9782832229156

Publisher: IEC
Distributor: IEC
ICS: 07.030
ICS: 07.120
ICS: 25.020
International TC: TC 113

Extended editions Extended editions (0)

Version history Related Corrigenda and Amendments (0)

Abstract

Products specifications