Standard

IEC 62047-17:2015 ED1

Mar 2015 Current

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Abstract

IEC 62047-17:2015 specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film is in the range of 0,1 μ to 10 μ, and the width of the rectangular and square membrane window and the diameter of the circular membrane range from 0,5 mm to 4 mm. The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure to the testing film specimen with bulging window. Elastic modulus and residual stress for the film materials can be determined with this method.

Products specifications

Standard from IEC
Published: March 5 2015
Edition: 1
Document type: IS
Pages
ISBN: 9782832222959

Publisher: IEC
Distributor: IEC
ICS: 31.080.99
International TC: TC 47/SC 47F

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Abstract

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